Impurity diffusion and gettering in silicon

symposium held November 27-30, 1984, Boston, Massachusetts, U.S.A.

By Richard B. Fair,Charles W. Pearce

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Publish Date

1985

Publisher

Materials Research Society

Language

eng

Pages

292

Description:

subjects: Diffusion, Semiconductor doping, Congresses, Defects, Semiconductors, Getters, Gases, absorption and adsorption