An edition of Polysilicon thin films and interfaces (1990)

Polysilicon thin films and interfaces

symposium held April 17-19, 1990, San Francisco, California, U.S.A.

By Theodore I. Kamins,Bruha Raicu,C. V. Thompson,Theodore Kamins

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Publish Date

1990

Publisher

Materials Research Society

Language

eng

Pages

403

Description:

subjects: Silicon, Thin film devices, Materials, Congresses, Electric properties, Integrated circuits, Science/Mathematics, Electronic Apparatus And Devices, Thin films