Cover of Microlithography

An edition of Microlithography (1998)

Microlithography

science and technology

By James R. Sheats,Bruce W. Smith,Kazuaki Suzuki

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Publish Date

1998

Publisher

Marcel Dekker

Language

eng

Pages

857

Description:

subjects: Complementary Metal oxide semiconductors, Integrated circuits, Manufacturing processes, Microlithography, Industrial applications, Masks, Design and construction, Metal oxide semiconductors, complementary