An edition of Microlithography (1998)
Science and Technology, Second Edition
By James R. Sheats,Bruce W. Smith,Kazuaki Suzuki
Publish Date
2018
Publisher
Taylor & Francis Group
Language
eng
Pages
857
Description:
subjects: Complementary Metal oxide semiconductors, Integrated circuits, Manufacturing processes, Microlithography, Industrial applications, Masks, Design and construction, Metal oxide semiconductors, complementary