An edition of Defects and diffusion in silicon processing (1997)
Defects and Diffusion in Silicon Processing
Symposium Held April 1-4, 1997, San Francisco, California, U.S.A (Materials Research Society Symposia Proceedings, V. 469.)
By S. Coffa
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Publish Date
June 1997
Publisher
Materials Research Society
Language
eng
Pages
541
Description: