An edition of Gas-phase and surface chemistry in electronic materials processing (1994)

Gas-Phase and Surface Chemistry in Electronic Materials Processing

Symposium Held November 29-December 2, 1993, Boston, Massachusetts, U.S.A. (Mate)

By T. J. Mountziaris,G. R. Paz-Pujalt

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Publish Date

May 1994

Publisher

Materials Research Society

Language

eng

Pages

556

Description:

subjects: Surfaces, Electronics, Materials, Congresses, Surface chemistry, Science, Science/Mathematics, SCI013000, SCI, Chemistry - General, Electronics, materials, Electronic materials series