An edition of Effect of disorder and defects in ion-implanted semiconductors (1997)
Effect of Disorder and Defects in Ion-Implanted Semiconductors
Electrical and Physiochemical Characterization, Volume 45 (Semiconductors and Semimetals)
By Albert Beer,R. K. Willardson,Eicke R. Weber
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Publish Date
April 22, 1997
Publisher
Academic Press
Language
eng
Pages
300
Description:
subjects: Ion implantation, Semiconductors, Semimetals