Cover of Rapid thermal and laser processing

An edition of Rapid thermal and laser processing (1993)

Rapid thermal and laser processing

24-25 September 1992, San Jose, California

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Publish Date

1993

Publisher

SPIE

Language

eng

Pages

167

Description:

subjects: Semiconductor doping, Multichip modules (Microelectronics), Semiconductor industry, Heat treatment, Laser use in, Semiconductors, Design and construction, Congresses, Rapid thermal processing, Plasma-enhanced chemical vapor deposition