An edition of Handbook of ion beam processing technology (1989)
Handbook of Ion Beam Processing Technology
Principles, Depostion, Film Modification and Synthesis (Materials Science & Process Technology S.) (Materials Science & Process Technology)
By Stephen M. Rossnagel,Harold R. Kaufman
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Publish Date
August 1, 1989
Publisher
Noyes Publications
Language
eng
Pages
438
Description:
subjects: Ion bombardment, Industrial applications, Ion implantation