An edition of Advanced metallization for ULSI applications in 1993 (1994)

Advanced metallization for ULSI applications in 1993

proceedings of the conference held October 5-7, 1993, San Diego, California, U.S.A., and October 26-27, 1993, Tokyo, Japan sponsored by Continuing Education in Engineering, University Extension, University of California, Berkeley, U.S.A.

By Yosi Shacham-Diamand