An edition of VLSI metallization (1987)

Vlsi Electronics Microstructure Science

Vlsi Metallization (V L S I Electronics)

By Norman G. Einspruch,Simon S. Cohen,Gennady Sh Gildenblat

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Publish Date

August 1987

Publisher

Academic Pr

Language

eng

Pages

480

Description:

subjects: Metallizing, Design and construction, Metallic films, Integrated circuits, Very large scale integration