An edition of 1999 4th International Symposium on Plasma Process-Induced Damage (1999)
1999 4th International Symposium on Plasma Process-Induced Damage
By International Symposium on Plasma Process-Induced Damage (4th 1999 Monterey, Calif.)
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Publish Date
November 1999
Publisher
IEEE Standards Office
Language
eng
Pages
218
1-2 of 2 Editions
1999 4th International Symposium on Plasma Process-Induced Damage
Language: eng
Pages: 224
Published In: November 1999
Publisher: IEEE Standards Office
1999 4th International Symposium on Plasma Process-Induced DamageMay 9-11, 1999, Monterey, California, USA
Language: eng
Pages: 211
Published In: 1999
Publisher: Northern California Chapter of the American Vacuum Society