An edition of Measurement Technology for Micro-Nanometer Devices (2016)

Measurement Technology for Micro-Nanometer Devices

By Wendong Zhang,Xiujian Chou,Tielin Shi,Zongmin Ma,Haifei Bao,Jingdong Chen,Liguo Chen,Dachao Li,Chenyang Xue

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Publish Date

2016

Publisher

Wiley & Sons, Incorporated, John

Language

eng

Pages

352

Description:

subjects: Physical measurements, Measurement, Nanotechnology, Testing, Microtechnology, Microelectromechanical devices, Microscopy, technique, Microelectromechanical systems