An edition of Handbook of Silicon Wafer Cleaning Technology (2018)

Handbook of Silicon Wafer Cleaning Technology

By Karen Reinhardt,Werner Kern

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Publish Date

2018

Publisher

Elsevier Science & Technology Books,William Andrew

Language

eng

Pages

760

Description:

subjects: Electric insulators and insulation, Semiconductors, Silicon-on-insulator technology, TECHNOLOGY & ENGINEERING, Mechanical