Plasma Deposited Thin Films
An edition of Plasma Deposited Thin Films (2017)
By Mort
Publish Date
2018
Publisher
Taylor & Francis Group
Language
eng
Pages
253
Description:
subjects: Plasma chemistry, Thin films, Thin film devices, Vapor-plating, Plasma engineering, Dispositifs à couches minces, Technique des plasmas, TECHNOLOGY & ENGINEERING, Mechanical