Principles of Plasma Discharges and Materials Processing

An edition of Principles of Plasma Discharges and Materials Processing (2005)

Principles of Plasma Discharges and Materials Processing

By Michael A. Lieberman,Alan J. Lichtenberg

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Publish Date

2005

Publisher

Wiley & Sons Canada, Limited, John

Language

eng

Pages

765

Description:

subjects: Plasma chemistry, Plasma dynamics, Surfaces (technology)