Preparation and certification of SRM-2530, ellipsometric parameters [delta] and [psi] and derived thickness and refractive index of a silicon dioxide layer on silicon

An edition of Preparation and certification of SRM-2530, ellipsometric parameters [delta] and [psi] and derived thickness and refractive index of a silicon dioxide layer on silicon (1988)

Preparation and certification of SRM-2530, ellipsometric parameters [delta] and [psi] and derived thickness and refractive index of a silicon dioxide layer on silicon

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Publish Date

1988

Publisher

U.S. Dept. of Commerce, National Institute of Standards and Technology,For sale by the Supt. of Docs., U.S. G.P.O.

Language

eng

Pages

Description:

subjects: Silicon, Refractive index, Ellipsometry, Mathematical models, Silica, Evaluation