Atomic Layer Deposition

Principles, Characteristics, and Nanotechnology Applications

By Tommi Kääriäinen

0 (0 Ratings)

2 Want to read0 Currently reading0 Have read

Publish Date

2013

Publisher

Wiley & Sons, Limited, John

Language

eng

Pages

272

Description:

subjects: Chemical vapor deposition, Epitaxy, Microelectronics, Nanotechnology, Atomic layer deposition, Vapor-plating