An edition of Gettering and defect engineering in semiconductor technology XI (2005)
Gettering And Defect Engineering in Semiconductor Technology XI
Proceedings of the 11th International Autumn Meeting Giens (close to Marseilles), France September 25-30, 2005 (Solid State Phenomena)
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Publish Date
November 30, 2005
Publisher
Trans Tech Pubn
Language
eng
Pages
814
Description:
subjects: Semiconductors, Congresses, Defects, Getters, Materials, Silicon crystals, Solid state electronics