Adhesion Aspects in MEMS/NEMS

An edition of Adhesion Aspects in MEMS/NEMS (2011)

Adhesion Aspects in MEMS/NEMS

By Seong H. Kim,Michael T. Dugger,Kash L. Mittal

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Publish Date

2011

Publisher

Taylor & Francis Group

Language

eng

Pages

420

Description:

subjects: Nanostructures, Surfaces (technology), Adhesion, Microelectromechanical systems