Cover of PACVD of TiN

An edition of PACVD of TiN (1995)

PACVD of TiN

By Blagica Bliznakovska

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Publish Date

1995

Publisher

Forschungszentrum Jülich

Language

eng

Pages

51

Description:

subjects: Plasma-enhanced chemical vapor deposition, Titanium nitride, Thin films