Silicon Wet Bulk Micromachining for MEMS

An edition of Silicon Wet Bulk Micromachining for MEMS (2017)

Silicon Wet Bulk Micromachining for MEMS

By Prem Pal,Kazuo Sato

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Publish Date

2017

Publisher

Jenny Stanford Publishing

Language

eng

Pages

412

Description:

subjects: Machining, Microelectromechanical systems, Micromachining, TECHNOLOGY & ENGINEERING, Mechanical