MEMS length and strain measurements using an optical interferometer

An edition of MEMS length and strain measurements using an optical interferometer (2001)

MEMS length and strain measurements using an optical interferometer

By J. C. Marshall

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Publish Date

2001

Publisher

U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology

Language

eng

Pages

Description:

subjects: Microelectromechanical systems, Interferometers