Capacitance cell measurement of the out-of-plane expansion of thin films

An edition of Capacitance cell measurement of the out-of-plane expansion of thin films (2001)

Capacitance cell measurement of the out-of-plane expansion of thin films

By Chad R. Snyder

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Publish Date

2001

Publisher

U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology

Language

eng

Pages

Description:

subjects: Thin-film circuits, Thin films, Thermal properties, Expansion (Heat), Measurement