An edition of Chemical mechanical planarization of microelectronic materials (1997)
Chemical mechanical planarization of microelectronic materials
By Joseph M. Steigerwald
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Publish Date
1997
Publisher
J. Wiley
Language
eng
Pages
337
1-3 of 3 Editions
Chemical Mechanical Planarization of Microelectronic Materials
Chemical Mechanical Planarization of Microelectronic Materials
Language: eng
Pages: 337
Published In: 2007
Publisher: Wiley & Sons, Limited, John
Chemical Mechanical Planarization of Microelectronic Materials
Chemical Mechanical Planarization of Microelectronic Materials
Language: eng
Pages: 337
Published In: 2008
Publisher: Wiley & Sons, Incorporated, John
Chemical mechanical planarization of microelectronic materials
Language: eng
Pages: 324
Published In: 1997
Publisher: J. Wiley