An edition of Thin-film deposition (1995)
principles and practice
By Smith, Donald L.
Publish Date
1995
Publisher
McGraw-Hill
Language
eng
Pages
616
Description:
subjects: Vapor-plating, Thin films, Thin film devices, Technologie industrielle, Ingénierie, Depositie (scheikunde), Dunne films, Chemical vapour deposition, Plasma's, Elektronenbundels, Epitaxie, Materiais e dispositivos semicondutores, Deposicao de vapor (engenharia eletrica), Couches minces