An edition of High energy and high dose ion implantation (1992)

High energy and high dose ion implantation

proceedings of Symposium C on High Energy Ion Implantation and Symposium D on Ion Beam Synthesis of Compound and Elemental Layers of the 1991 E-MRS Spring Conference, Strasbourg, France, May 28-31, 1991

By Symposium C on High Energy Ion Implantation (1991 Strasbourg, France),S. U. Campisano,J. Gyulai,P. L. F. Hemment