High energy and high dose ion implantation

An edition of High energy and high dose ion implantation (1992)

High Energy and High Dose Ion Implantation

By Symposium C on High Energy Ion Implantation (1991 Strasbourg, France),S. U. Campisano,J. Gyulai,P. L. F. Hemment

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Publish Date

1992

Publisher

Elsevier Science & Technology Books

Language

eng

Pages

320

Description:

subjects: Compound semiconductors, Congresses, Ion bombardment, Ion implantation, Superlattices as materials