Antireflecting-chromium linewidth standard, SRM 475, for calibration of optical microscope linewidth measuring systems
An edition of Antireflecting-chromium linewidth standard, SRM 475, for calibration of optical microscope linewidth measuring systems (1992)
By Carol F. Vezzetti
Publish Date
1992
Publisher
U.S. Dept. of Commerce, National Institute of Standards and Technology,Order from National Technical Information Service]
Language
eng
Pages
37