Ion implantation technology-92

An edition of Ion implantation technology-92 (1993)

Ion Implantation Technology

Proceedings

By International Conference on Ion Implantation Technology (9th 1992 Gainesville, Fla.),D. Downey,M. Farley,K. S. Jones

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Publish Date

April 1993

Publisher

North-Holland

Language

eng

Pages

699

Description:

subjects: Congresses, Ion implantation, Semiconductor doping, Semiconductors