Hydrogenated amorphous silicon alloy deposition processes

An edition of Hydrogenated amorphous silicon alloy deposition processes (1993)

Hydrogenated amorphous silicon alloy deposition processes

By Werner Luft

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Publish Date

1993

Publisher

M. Dekker

Language

eng

Pages

327

Description:

subjects: Design and construction, Electric properties, Optical properties, Plasma-enhanced chemical vapor deposition, Silicon alloys, Thin film devices, Thin films, Silicon compounds