Fabrication of micrometer line width SAW filters using direct optical projection
An edition of Fabrication of micrometer line width SAW filters using direct optical projection (1975)
By W. J. Kearns
Publish Date
1975
Publisher
United States Air Force, Air Force Systems Command, Air Force Cambridge Research Laboratories, Microwave Physics Laboratory
Language
eng
Pages
12
Description:
Projection printing directly on acoustic substrates using a 10X master and a high resolution 10:1 reduction lens in conjunction with the photoresist stripping technique has resulted in successful fabrication of micrometer line-width SAW filters, which are used in command, control, and communications and electronic sensing applications. This system and a typical 320 MHz (1.26 micrometer line width) SAW filter are described in detail.
subjects: Acoustic surface wave devices