Low-energy sputtering studies of boron nitride with xenon ions

An edition of Low-energy sputtering studies of boron nitride with xenon ions (1999)

Low-energy sputtering studies of boron nitride with xenon ions

By P. K. Ray

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Publish Date

1999

Publisher

National Aeronautics and Space Administration, Lewis Research Center,National Technical Information Service, distributor

Language

eng

Pages

Description:

subjects: Charged particles, Electron guns, Heavy elements, Ion beams, Isotopes, Isotopic enrichment, Mass spectrometers, Mass spectroscopy, Neutral particles, Quadrupoles