An edition of Beam technologies for integrated processing (1992)
Beam technologies for integrated processing
report of the Committee on Beam Technologies: Opportunities in Attaining Fully-Integrated Processing Systems, National Materials Advisory Board, Commission on Engineering and Technical Systems, National Research Council.
By National Research Council (U.S.). Committee on Beam Technologies: Opportunities in Attaining Fully-Integrated Processing Systems.
Publish Date
1992
Publisher
National Academy Press
Language
eng
Pages
89
Description:
xii, 89 p. : 28 cm
subjects: Industrial applications, Materials, Microelectronics, Microelectronics industry, Molecular beams, Plasma-enhanced chemical vapor deposition, Particle beams, Molecular beams -- Industrial applications, Microelectronics -- Materials, Plasma-enhanced chemical vapor deposition -- Industrial applications, Integrated optics, Beam optics