An edition of Handbook of sputter deposition technology (1992)

Handbook of sputter deposition technology

principles, technology, and applications

By Kiyotaka Wasa

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Publish Date

1992

Publisher

Noyes Publications

Language

eng

Pages

488

Description:

subjects: Cathode sputtering (Plating process), Thin films, Nanostructured materials, Sputtering (physics), Handbooks, manuals