An edition of Thin film materials technology (2004)
Thin film materials technology
sputtering of compound materials
By Kiyotaka Wasa
Publish Date
2004
Publisher
William Andrew Pub.,Springer-Verlag
Language
eng
Pages
525
Description:
"This book thoroughly reviews basic thin film technology and deposition processes, sputtering processes, structural control of compound thin films, and microfabrication by sputtering. It contains the newest experimental and technological information about ceramic thin films, a key technology for nanomaterials in high-speed information applications and large-area functional coatings. This book is an invaluable resource for scientists, engineers, and graduate students in the semiconductor, energy, environment, vehicle, medical, and food industries."--BOOK JACKET.