An edition of Ionized-cluster beam deposition and epitaxy (1988)
Ionized-cluster beam deposition and epitaxy
By Toshinori Takagi
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Publish Date
1988
Publisher
Noyes Publications
Language
eng
Pages
231
Description:
subjects: Design and construction, Epitaxy, Thin film devices, Thin films, Épitaxie, Couches minces, Epitaxie