An edition of Ion implantation and plasma assisted processes (1988)
Ion implantation and plasma assisted processes
proceedings of the Conference on Ion Implantation and Plasma Assisted Processes for Industrial Applications, Atlanta, Georgia, 22-25 May 1988
By Conference on Ion Implantation and Plasma Assisted Processes for Industrial Applications (1988 Atlanta, Ga.),Robert F. Hochman,Hillary Solnick-Legg,Keith O. Legg
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Publish Date
1988
Publisher
ASM International,Brand: Asm Intl,Asm Intl
Language
eng
Pages
205
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