Proceedings of the Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films

An edition of Proceedings of the Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films (1989)

Proceedings of the Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films

By Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films (1988 Chicago, Ill.)

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Publish Date

1989

Publisher

Electrochemical Society

Language

eng

Pages

455

Description:

subjects: Congresses, Electric insulators and insulation, Silicon dioxide, Silicon nitride, Thin film devices, Thin films, Silica