Analytic analysis of ellipsometric errors

By Deane Chandler-Horowitz

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Publish Date

1986

Publisher

U.S. Dept. of Commerce, National Bureau of Standards,For sale by the Supt. of Docs., U.S. G.P.O.

Language

eng

Pages

1-2 of 2 Editions

Analytic analysis of ellipsometric errors.

Language: eng

Published In: 1986

Publisher: National Bureau of Standards

Analytic analysis of ellipsometric errors

Language: eng

Pages: 32

Published In: 1986

Publisher: U.S. Dept. of Commerce, National Bureau of Standards, For sale by the Supt. of Docs., U.S. G.P.O.