Proceedings of the Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films

An edition of Proceedings of the Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films (1987)

Proceedings of the Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films

By Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films (2nd 1986 San Diego, Calif.)

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Publish Date

1987

Publisher

Electrochemical Society)

Language

eng

Pages

550

Description:

subjects: Congresses, Electric insulators and insulation, Silicon dioxide, Silicon nitride, Thin film devices, Thin films, Silicon oxide films, Silica