

An edition of Proceedings of the 10th International Autumn Meeting Gettering and defect engineering in semiconductor technology (2004)
GADEST 2003, Seehotel Zeuthen (suburb of Berlin), State of Brandenburg, Germany, September 21-26, 2003
By International Autumn Meeting "Gettering and Defect Engineering in Semiconductor Technology" (10th 2003 Seehotel Zeuthen, Germany)
Publish Date
2004
Publisher
SciTech Publications Ltd.,Trans Tech Pub. [distributor],Scitec Publications, Ltd.
Language
eng
Pages
693
Description: