An edition of Plasma electronics (2005)
Plasma Electronics
Applications in Microelectronic Device Fabrication (Series in Plasma Physics)
By T. Makabe,Z. Petrovic
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Publish Date
March 27, 2006
Publisher
Taylor & Francis
Language
eng
Pages
350
Description:
subjects: Plasma engineering, Mechanical engineering, Science/Mathematics, Physics, Science, Technology & Industrial Arts, Electronics - General, Engineering - Mechanical, Science / Physics, Microelectronics, Plasma (ionized gases), Engineering, Technique des plasmas, TECHNOLOGY & ENGINEERING, Mechanical