

An edition of Proceedings of the 9th International Autumn Meeting Gettering and defect engineering in semiconductor technology (2001)
S. Tecla, Italy, September 30-October 3, 2001 (Solid State Phenomena,)
By International Autumn Meeting "Gettering and Defect Engineering in Semiconductor Technology" (9th 2001 S. Tecla, Italy)
Publish Date
December 2001
Publisher
Sci-Tech Pub. Ltd.
Language
eng
Pages
823
Description: