EMC 2000
An edition of EMC 2000 (2000)
17th European Mask Conference on Mask Technology for Integrated Circuits and Micro-components : lectures held at the GMM-Conference, November 13-14, 2000 in Munich-Unterhaching, Germany
By European Conference on Mask Technology for Integrated Circuits and Microcomponents (17th 2000 Munich, Germany)
Publish Date
2000
Publisher
VDE-Verlag
Language
eng
Pages
201
Description:
subjects: Congresses, Integrated circuits, Masks, Microlithography, X-ray lithography