Nano- and microelectromechanical systems
An edition of Nano- and microelectromechanical systems (2000)
Fundamentals of Nano- and Microengineering, Second Edition
By Sergey Edward Lyshevski
Publish Date
2000
Publisher
Taylor & Francis Group
Language
eng
Pages
744
Description:
"Nano- and Microelectromechanical Systems builds the theoretical foundation needed to develop, analyze, and prototype NEMS and MEMS, their components, and their structures. It provides the background engineers need to model, design, simulate, control, implement, and deploy NEMS and MEMS. Most importantly, it prepares them to continue research in this challenging field and contribute to its further advancement."--BOOK JACKET.
subjects: Microelectromechanical systems, Nanotechnology, Microelectronics, Electromechanical devices, Engineering, Microsystèmes électromécaniques, Nanotechnologie, TECHNOLOGY & ENGINEERING / Mechanical, Elektromechanisches Bauelement, Mikromechanik, Mikrosystemtechnik, Microeletrônica, Nanotecnologia