Automated photomask inspection

By Donald B. Novotny

0 (0 Ratings)

0 Want to read0 Currently reading0 Have read

Publish Date

1978

Publisher

U.S. Dept. of Commerce, National Bureau of Standards : for sale by the Supt. of Docs., U.S. Govt. Print. Off.

Language

eng

Pages

Description:

subjects: Integrated circuits, Masks, Optical instruments, Testing, Photography, Masking, Inspection, Semiconductors, Measurement