Production-compatible microelectronic test structures for the measurement of interface state density and neutral trap density

An edition of Production-compatible microelectronic test structures for the measurement of interface state density and neutral trap density (1982)

Production-compatible microelectronic test structures for the measurement of interface state density and neutral trap density

By Russell, T. J.

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Publish Date

1982

Publisher

U.S. Dept. of Commerce, National Bureau of Standards,National Technical Information Service, distributor

Language

eng

Pages

Description:

subjects: Electric charge and distribution, Microelectronics, Oxides, Thermal properties