An edition of Rapid Thermal and Integrated Processing III (1994)
Rapid Thermal and Integrated Processing III
Symposium Held April 4-7, 1994, San Francisco, California, U.S.A (Materials Research Society Symposium,)
By Jimmie J. Wortman
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Publish Date
September 1994
Publisher
Materials Research Society
Language
eng
Pages
449
Description:
subjects: Thermal analysis, Semiconductors, Congresses, Heat treatment, Semiconductor doping, Chemical vapor deposition, Dielectrics, Semi-conducteurs, Congrès, Traitement thermique, Dopage, Dépôt chimique en phase vapeur, Diélectriques, CVD-Verfahren, Dotierung, Halbleiter, Wärmebehandlung, Kongreß