

An edition of Advanced Metallization for Devices and Circuits - Science, Technology, and Manufacturability (1994)
symposium held April 4-8, 1994, San Francisco, California, U.S.A.
By Shyam P. Murarka
Publish Date
1994
Publisher
Materials Research Society
Language
eng
Pages
768
Description:
subjects: Metallizing, Semiconductors, Congresses, Metallic films, Design and construction