Plasma-deposited amorphous hydrogenated carbon films and their tribological properties

An edition of Plasma-deposited amorphous hydrogenated carbon films and their tribological properties (1989)

Plasma-deposited amorphous hydrogenated carbon films and their tribological properties

By Kazuhisa Miyoshi

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Publish Date

1989

Publisher

Lewis Research Center

Language

eng

Pages

Description:

subjects: Carbon, Deposition, Lubricants, Plasmas (Physics), Thin films, Tribology